Abstract
This document describes a digital twin for monitoring and controlling the semiconductor ingot growth process. The use case is analysed and designed using the ISO 23247 series. The result is a systematic view of the use case implementation and a high-level design of the digital twins, which can be directly implemented using the readily available tools and languages, including those supported by the relevant standards.
General information
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Status: PublishedPublication date: 2025-05Stage: International Standard published [60.60]
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Edition: 1Number of pages: 15
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Technical Committee :ISO/TC 184/SC 4
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